Publication:

Etching of CoSi2 in HF-based solutions

Date

1995

Journal article

Simple item page Full metadata Statistics

Files

606.pdf 304.89 KB

Author(s)

Alves Donaton, Ricardo

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Journal

Appied Surface Science

Metrics

2164 since deposited on 2021-09-29

2last month

Acq. date: 2025-12-21