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Combined atomic force microscope and acoustic wave devices: application to electrodeposition

dc.contributor.authorFriedt, Jean-Michel
dc.contributor.authorChoi, Kang-Hoon
dc.contributor.authorFrancis, Laurent
dc.contributor.authorCampitelli, Andrew
dc.date.accessioned2021-10-14T21:39:17Z
dc.date.available2021-10-14T21:39:17Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6336
dc.sourceIIOimport
dc.titleCombined atomic force microscope and acoustic wave devices: application to electrodeposition
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conference49th American Vacuum Society Meeting
dc.source.conferencedate3/11/2002
dc.source.conferencelocationDenver, Co USA
imec.availabilityPublished - imec


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