Dual damascene patterning for full spin-on stack of porous low-K material

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Authors
Furukawa, Yukiko; Kokubo, Terukazu; Struyf, Herbert; Maenhoudt, Mireille; Vanhaelemeersch, Serge; Gravesteijn, Dirk
Conference
Proceedings of the IEEE International Interconnect Technology Conference
Title
Dual damascene patterning for full spin-on stack of porous low-K material
Publication type
Proceedings paper
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