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EFTEM as a porosity metrology tool for low-k dielectrics

dc.contributor.authorHens, S.
dc.contributor.authorBender, Hugo
dc.contributor.authorVan Landuyt, J.
dc.contributor.authorIacopi, Francesca
dc.contributor.authorWeidner, K.
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T21:45:56Z
dc.date.available2021-10-14T21:45:56Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6381
dc.sourceIIOimport
dc.titleEFTEM as a porosity metrology tool for low-k dielectrics
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceConference Book Joint Microscopy Meeting - JMM
dc.source.conferencedate25/06/2002
dc.source.conferencelocationLille France
imec.availabilityPublished - imec


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