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Defect inspection of Cu metallization

dc.contributor.authorHolsteyns, Frank
dc.contributor.authorCarbonell, Laure
dc.contributor.authorVos, Ingrid
dc.contributor.authorVrancken, Evi
dc.contributor.authorTokei, Zsolt
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-14T21:49:07Z
dc.date.available2021-10-14T21:49:07Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6401
dc.sourceIIOimport
dc.titleDefect inspection of Cu metallization
dc.typeOral presentation
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorVrancken, Evi
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVos, Ingrid::0000-0002-1746-2004
dc.source.peerreviewno
dc.source.conferenceKLA-Tencor Yield Management Seminar
dc.source.conferencedate17/04/2002
dc.source.conferencelocationMünchen Germany
imec.availabilityPublished - imec


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