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Removal of nano-particles by using megasonic cleaning

dc.contributor.authorHolsteyns, Frank
dc.contributor.authorVereecke, Guy
dc.contributor.authorCoenen, V.
dc.contributor.authorVos, Rita
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-14T21:49:25Z
dc.date.available2021-10-14T21:49:25Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6403
dc.sourceIIOimport
dc.titleRemoval of nano-particles by using megasonic cleaning
dc.typeOral presentation
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.conferenceForum Acusticum
dc.source.conferencedate16/10/2002
dc.source.conferencelocationSevilla Spain
imec.availabilityPublished - imec


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