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Conference contributions
Development of an environmentally-friendly HCl gas-phase clean
Publication:
Development of an environmentally-friendly HCl gas-phase clean
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Date
1995
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Elsmore, Chris
;
Meuris, Marc
;
Mertens, Paul
;
Hurd, Trace
;
Heyns, Marc
Journal
Abstract
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1977
since deposited on 2021-09-29
3
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1977
since deposited on 2021-09-29
3
last month
Acq. date: 2025-12-10
Citations