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Model for interface defect and positive charge generation in ultrathin SiO2/ZrO2 gate dielectric stacks
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Authors
Houssa, M.
;
Autran, J.L.
;
Stesmans, Andre
;
Heyns, Marc
Issue
4
Journal
Applied Physics Letters
Volume
81
Title
Model for interface defect and positive charge generation in ultrathin SiO2/ZrO2 gate dielectric stacks
Publication type
Journal article
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