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Sputter yields and Ge migration in oxygen-bombarded SiGe

dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorBrijs, Bert
dc.contributor.authorJanssens, Tom
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T21:51:35Z
dc.date.available2021-10-14T21:51:35Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6416
dc.sourceIIOimport
dc.titleSputter yields and Ge migration in oxygen-bombarded SiGe
dc.typeOral presentation
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.conferenceSIMS Europe
dc.source.conferencedate16/09/2002
dc.source.conferencelocationMünster Germany
imec.availabilityPublished - imec


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