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Development of an environmentally-friendly HCl gas-phase clean

dc.contributor.authorElsmore, Chris
dc.contributor.authorMeuris, Marc
dc.contributor.authorMertens, Paul
dc.contributor.authorHurd, Trace
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-29T13:06:13Z
dc.date.available2021-09-29T13:06:13Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/641
dc.sourceIIOimport
dc.titleDevelopment of an environmentally-friendly HCl gas-phase clean
dc.typeProceedings paper
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage487
dc.source.endpage494
dc.source.conferenceProceedings IES 41st Annual Technical Meeting
dc.source.conferencedate30/04/1995
dc.source.conferencelocationAnaheim, CA USA
imec.availabilityPublished - open access


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