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Analysis of the nonlinear behavior of a MEMS variable capacitor

dc.contributor.authorInnocent, Manuel
dc.contributor.authorWambacq, Piet
dc.contributor.authorDonnay, Stephane
dc.contributor.authorTilmans, Harrie
dc.contributor.authorEngels, Marc
dc.contributor.authorDe Man, Hugo
dc.contributor.authorSansen, Willy
dc.date.accessioned2021-10-14T21:52:47Z
dc.date.available2021-10-14T21:52:47Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6423
dc.sourceIIOimport
dc.titleAnalysis of the nonlinear behavior of a MEMS variable capacitor
dc.typeProceedings paper
dc.contributor.imecauthorWambacq, Piet
dc.contributor.imecauthorDonnay, Stephane
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Man, Hugo
dc.contributor.orcidimecWambacq, Piet::0000-0003-4388-7257
dc.contributor.orcidimecDonnay, Stephane::0000-0003-2489-4793
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage234
dc.source.endpage237
dc.source.conference5th International Conference on Modeling and Simulation of Microsystems - MSM
dc.source.conferencedate22/04/2002
dc.source.conferencelocationSan Juan Puerto Rico
imec.availabilityPublished - imec


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