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SIMS-profiling of Boron: fundamentals and practical applications

dc.contributor.authorJanssens, Tom
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorBrijs, Bert
dc.contributor.authorGeenen, Luc
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T21:54:03Z
dc.date.available2021-10-14T21:54:03Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6431
dc.sourceIIOimport
dc.titleSIMS-profiling of Boron: fundamentals and practical applications
dc.typeOral presentation
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceIon Beam Analysis and Modification of Functional Surfaces and Layers
dc.source.conferencedate20/09/2002
dc.source.conferencelocationGroningen The Netherlands
imec.availabilityPublished - imec


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