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Trends in the oxygen enhancement of the ionisation probabilities of elements sputtered from Si

dc.contributor.authorJanssens, Tom
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorVandervorst, Alain
dc.date.accessioned2021-10-14T21:54:12Z
dc.date.available2021-10-14T21:54:12Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6432
dc.sourceIIOimport
dc.titleTrends in the oxygen enhancement of the ionisation probabilities of elements sputtered from Si
dc.typeOral presentation
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.conference3rd European Workshop on Secondary Ion Mass Spectrometry - SIMS Europe
dc.source.conferencedate15/09/2002
dc.source.conferencelocationMünster Germany
imec.availabilityPublished - imec


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