Authors

Job, R.; Ulyashin, A.G.; Huang, Y.L.; Fahrner, W.R.; Simoen, Eddy; Claeys, Cor; Niedernostheide, F.-J.; Schulze, H.-J.; Tonelli, G.

Conference

Defect- and Impurity-Engineered Semiconductors and Devices III

Title

Doping of oxidized float zone silicon by thermal donors- a low thermal budget doping method for device applications?

Publication type

Proceedings paper