High quality SBT ferroelectric capacitor fabrication using Iridium bottom electrodes

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Authors
Johnson, Jo; Cella, Silvia; Lisoni, Judit; Everaert, Jean-Luc; Wouters, Dirk
Conference
MRS Fall Meeting Symposium U: Ferroelectric Thin Films XI
Title
High quality SBT ferroelectric capacitor fabrication using Iridium bottom electrodes
Publication type
Oral presentation
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