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High quality SBT ferroelectric capacitor fabrication using Iridium bottom electrodes

dc.contributor.authorJohnson, Jo
dc.contributor.authorLisoni, Judit
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-14T21:56:33Z
dc.date.available2021-10-14T21:56:33Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6446
dc.sourceIIOimport
dc.titleHigh quality SBT ferroelectric capacitor fabrication using Iridium bottom electrodes
dc.typeOral presentation
dc.contributor.imecauthorEveraert, Jean-Luc
dc.source.peerreviewno
dc.source.conferenceSymposium on Thin Ferroelectric Films
dc.source.conferencedate18/12/2002
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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