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Irridium based electrodes for ferroelectric capacitor fabrication

dc.contributor.authorJohnson, Jo
dc.contributor.authorLisoni, Judit
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-14T21:56:52Z
dc.date.available2021-10-14T21:56:52Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6448
dc.sourceIIOimport
dc.titleIrridium based electrodes for ferroelectric capacitor fabrication
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage59
dc.source.endpage64
dc.source.conferenceFerroelectric Thin Films X
dc.source.conferencedate25/11/2001
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 688


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