dc.contributor.author | Kim, Young-Chang | |
dc.contributor.author | Vandenberghe, Geert | |
dc.contributor.author | Ronse, Kurt | |
dc.date.accessioned | 2021-10-14T22:02:05Z | |
dc.date.available | 2021-10-14T22:02:05Z | |
dc.date.issued | 2002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6479 | |
dc.source | IIOimport | |
dc.title | AttPSM CD control: mask bias and flare effects | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vandenberghe, Geert | |
dc.contributor.imecauthor | Ronse, Kurt | |
dc.contributor.orcidimec | Ronse, Kurt::0000-0003-0803-4267 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1041 | |
dc.source.endpage | 1053 | |
dc.source.conference | Optical Microlithography XV | |
dc.source.conferencedate | 5/03/2002 | |
dc.source.conferencelocation | Santa Clara, CA USA | |
imec.availability | Published - open access | |
imec.internalnotes | Proceedings of SPIE; Vol. 4691 | |