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Piezoelectric versus electrostatic actuation for a capacitive RF-MEMS switch

dc.contributor.authorKlaasse, Gerard
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-14T22:02:45Z
dc.date.available2021-10-14T22:02:45Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6483
dc.sourceIIOimport
dc.titlePiezoelectric versus electrostatic actuation for a capacitive RF-MEMS switch
dc.typeProceedings paper
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage631
dc.source.endpage634
dc.source.conferenceProceedings 3rd Workshop on Semiconductor Sensor and Actuator - SeSens
dc.source.conferencedate29/11/2002
dc.source.conferencelocationVeldhoven The Netherlands
imec.availabilityPublished - imec
imec.internalnotesCD-ROM only


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