dc.contributor.author | Kubicek, Stefan | |
dc.contributor.author | De Meyer, Kristin | |
dc.date.accessioned | 2021-10-14T22:05:30Z | |
dc.date.available | 2021-10-14T22:05:30Z | |
dc.date.issued | 2002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6499 | |
dc.source | IIOimport | |
dc.title | CMOS scaling to 25nm gate lengths | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Kubicek, Stefan | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 259 | |
dc.source.endpage | 270 | |
dc.source.conference | Proceedings of the 4th International Conference on Advanced Semiconductor Devices and Microsystems - ASDAM | |
dc.source.conferencedate | 14/10/2002 | |
dc.source.conferencelocation | Smolenice Castle Slovakia | |
imec.availability | Published - open access | |