Show simple item record

Preparation and characterization of electrochemically deposited copper alloys

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorVervoort, Iwan
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorConard, Thierry
dc.contributor.authorVanhaeren, Danielle
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T22:10:52Z
dc.date.available2021-10-14T22:10:52Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6530
dc.sourceIIOimport
dc.titlePreparation and characterization of electrochemically deposited copper alloys
dc.typeProceedings paper
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVanhaeren, Danielle
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVanhaeren, Danielle::0000-0001-8624-9533
dc.source.peerreviewno
dc.source.beginpage191
dc.source.endpage196
dc.source.conferenceAdvanced Metallization Conference 2001
dc.source.conferencedate9/10/2001
dc.source.conferencelocationMontreal Canada
imec.availabilityPublished - imec
imec.internalnotesConference Proceedings ULSI XVII


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record