Optimization of design and technology for uncooled polySiGe microbolometer arrays

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Authors
Leonov, Vladimir; Perova, Natalia; Vermeiren, Jan; Grietens, Bob; Goessens, Claus; De Moor, Piet; Van Hoof, Chris
Conference
Infrared Detectors and Focal Plane Arrays VII
Title
Optimization of design and technology for uncooled polySiGe microbolometer arrays
Publication type
Proceedings paper
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