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Optimization of junctions formed by solid phase epitaxial regrowth for sub-70nm CMOS

dc.contributor.authorLindsay, Richard
dc.contributor.authorPawlak, Bartek
dc.contributor.authorStolk, Peter
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T22:12:37Z
dc.date.available2021-10-14T22:12:37Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6540
dc.sourceIIOimport
dc.titleOptimization of junctions formed by solid phase epitaxial regrowth for sub-70nm CMOS
dc.typeProceedings paper
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpageC2.1
dc.source.conferenceSilicon Front-End Junction Formation Technologies
dc.source.conferencedate1/04/2002
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Proceedings; Vol. 717


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