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Excimer laser microvia technology in MCMs

dc.contributor.authorManirambona, B.
dc.contributor.authorDe Baets, Johan
dc.contributor.authorVervaet, A.
dc.date.accessioned2021-10-14T22:17:57Z
dc.date.available2021-10-14T22:17:57Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6570
dc.sourceIIOimport
dc.titleExcimer laser microvia technology in MCMs
dc.typeOral presentation
dc.contributor.imecauthorDe Baets, Johan
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium D: Physics and Chemistry of Laser Materials Processing
dc.source.conferencedate18/06/2002
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


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