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Characterization of ALD diffusion barrier on low-k dielectric polymer by contact angle measurements

dc.contributor.authorMartin Hoyas, Ana
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T22:20:37Z
dc.date.available2021-10-14T22:20:37Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6584
dc.sourceIIOimport
dc.titleCharacterization of ALD diffusion barrier on low-k dielectric polymer by contact angle measurements
dc.typeOral presentation
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceNew Trends in Applied Surface Science
dc.source.conferencedate23/05/2002
dc.source.conferencelocationNamur Belgium
imec.availabilityPublished - imec


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