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A novel approach to characterization of a low-k dielectric polymer surface
Publication:
A novel approach to characterization of a low-k dielectric polymer surface
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Martin Hoyas, Ana
;
Schuhmacher, Jorg
;
Whelan, Caroline
;
Baklanov, Mikhaïl
;
Carbonell, Laure
;
Schaekers, Marc
;
Celis, Jean-Pierre
;
Maex, Karen
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2003
since deposited on 2021-10-14
1
last month
Acq. date: 2026-01-06
Citations
Metrics
Views
2003
since deposited on 2021-10-14
1
last month
Acq. date: 2026-01-06
Citations