A novel approach to characterization of a low-k dielectric polymer surface

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Authors
Martin Hoyas, Ana; Schuhmacher, Jorg; Whelan, Caroline; Baklanov, Mikhaïl; Carbonell, Laure; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen
Conference
Ph.D. Symposium
Title
A novel approach to characterization of a low-k dielectric polymer surface
Publication type
Oral presentation
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