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Determination of Young's Modulus of porous low-k films by ellipsometruc porosimetry

dc.contributor.authorMoguilnikov, Konstantin
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-14T22:27:26Z
dc.date.available2021-10-14T22:27:26Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6620
dc.sourceIIOimport
dc.titleDetermination of Young's Modulus of porous low-k films by ellipsometruc porosimetry
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpageF29
dc.source.endpageF31
dc.source.journalElectrochemical and Solid-State Letters
dc.source.issue12
dc.source.volume5
imec.availabilityPublished - imec


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