Publication:
Determination of Young's Modulus of porous low-k films by ellipsometruc porosimetry
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1869 since deposited on 2021-10-14
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Acq. date: 2026-01-08
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Views
1869 since deposited on 2021-10-14
2last month
2last week
Acq. date: 2026-01-08
Citations