Determination of Young's Modulus of porous low-k films by ellipsometruc porosimetry

Publication:

2002

Journal article

Author(s)

Moguilnikov, Konstantin

;

Baklanov, Mikhaïl

Electrochemical and Solid-State Letters

1869 since deposited on 2021-10-14

2last month

Acq. date: 2026-01-26