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Flexible fabrication of microlenses in polymer layers with excimer laser ablation

dc.contributor.authorNaessens, Kris
dc.contributor.authorVan Daele, Peter
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-14T22:30:16Z
dc.date.available2021-10-14T22:30:16Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6634
dc.sourceIIOimport
dc.titleFlexible fabrication of microlenses in polymer layers with excimer laser ablation
dc.typeOral presentation
dc.contributor.imecauthorVan Daele, Peter
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecVan Daele, Peter::0000-0003-0557-7741
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium D: Physics and Chemistry of Laser Materials Processing
dc.source.conferencedate18/06/2002
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


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