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Radiation damage of polycrystalline silicon films

dc.contributor.authorOhyama, Hidenori
dc.contributor.authorNakabayashi, M.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorTanaka, K.
dc.contributor.authorKobayashi, K.
dc.date.accessioned2021-10-14T22:36:54Z
dc.date.available2021-10-14T22:36:54Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6667
dc.sourceIIOimport
dc.titleRadiation damage of polycrystalline silicon films
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage176
dc.source.endpage180
dc.source.journalNuclear Instruments & Methods in Physics Research B
dc.source.issue1_4
dc.source.volume186
imec.availabilityPublished - imec


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