Radiation damage of polycrystalline silicon films

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Authors

Ohyama, Hidenori; Nakabayashi, M.; Simoen, Eddy; Claeys, Cor; Tanaka, K.; Kobayashi, K.

Issue

1_4

Journal

Nuclear Instruments & Methods in Physics Research B

Volume

186

Title

Radiation damage of polycrystalline silicon films

Publication type

Journal article

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