Publication:
Radiation damage of polycrystalline silicon films
Date
| dc.contributor.author | Ohyama, Hidenori | |
| dc.contributor.author | Nakabayashi, M. | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Tanaka, K. | |
| dc.contributor.author | Kobayashi, K. | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-14T22:36:54Z | |
| dc.date.available | 2021-10-14T22:36:54Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6667 | |
| dc.source.beginpage | 176 | |
| dc.source.endpage | 180 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Nuclear Instruments & Methods in Physics Research B | |
| dc.source.volume | 186 | |
| dc.title | Radiation damage of polycrystalline silicon films | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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