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Micromachined tunable dielectric resonators

dc.contributor.authorPan, Wanling
dc.contributor.authorFiorini, Paolo
dc.contributor.authorDi Monaco, Orsola
dc.contributor.authorBaert, Kris
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-14T22:41:41Z
dc.date.available2021-10-14T22:41:41Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6691
dc.sourceIIOimport
dc.titleMicromachined tunable dielectric resonators
dc.typeProceedings paper
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorMertens, Robert
dc.source.peerreviewno
dc.source.beginpage653
dc.source.endpage656
dc.source.conferenceProceedings of the 3rd Workshop on Semiconductor Sensor and Actuator Technology - SeSens
dc.source.conferencedate29/11/2002
dc.source.conferencelocationVeldhoven The Netherlands
imec.availabilityPublished - imec
imec.internalnotesCD-ROM Proceedings


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