Effect of N2 annealing on AlxZryOz oxide

Thumbnail
Metadata
Show full item record
Authors
Petry, Jasmine; Richard, Olivier; Vandervorst, Wilfried; Conard, Thierry; Chen, Jerry; Cosnier, Vincent
Conference
AVS 49th International Symposium
Title
Effect of N2 annealing on AlxZryOz oxide
Publication type
Oral presentation
Collections