Authors

Rothschild, Aude; Veloso, Anabela; Mertens, Sofie; Schaekers, Marc; Cubaynes, Florence; Date, Lucien; Pique, Didier

Conference

5th Technical and Scientific Meeting of CREMSI: New Tools and Processes for Thin Active Layers in the Advanced FEOL Techniques

Title

Ultra thin plasma nitrided oxides for sub-100nm CMOS

Publication type

Oral presentation