dc.contributor.author | Rottenberg, Xavier | |
dc.contributor.author | Jansen, Henri | |
dc.contributor.author | Fiorini, Paolo | |
dc.contributor.author | De Raedt, Walter | |
dc.contributor.author | Tilmans, Harrie | |
dc.date.accessioned | 2021-10-14T22:59:01Z | |
dc.date.available | 2021-10-14T22:59:01Z | |
dc.date.issued | 2002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6775 | |
dc.source | IIOimport | |
dc.title | Novel RF-MEMS capacitive switching structures | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Rottenberg, Xavier | |
dc.contributor.imecauthor | De Raedt, Walter | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.orcidimec | De Raedt, Walter::0000-0002-7117-7976 | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.source.peerreview | no | |
dc.source.beginpage | 809 | |
dc.source.endpage | 812 | |
dc.source.conference | Proceedings 32nd European Microwave Conference | |
dc.source.conferencedate | 23/09/2002 | |
dc.source.conferencelocation | Milano Italy | |
imec.availability | Published - imec | |