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Boosted RF-MEMS capacitive shunt switches

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorJansen, Henri
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorFiorini, Paolo
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-14T22:59:14Z
dc.date.available2021-10-14T22:59:14Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6776
dc.sourceIIOimport
dc.titleBoosted RF-MEMS capacitive shunt switches
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage667
dc.source.endpage671
dc.source.conferenceProceedings 3rd Workshop on Semiconductor Sensor and Actuator - SeSens
dc.source.conferencedate29/11/2002
dc.source.conferencelocationVeldhoven The Netherlands
imec.availabilityPublished - imec


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