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Just-Clean- Enough technology for the 21st century

dc.contributor.authorHeyns, Marc
dc.contributor.authorMeuris, Marc
dc.contributor.authorMertens, Paul
dc.contributor.authorHurd, Trace
dc.contributor.authorSchmidt, Harald
dc.contributor.authorDepas, Michel
dc.contributor.authorRotondaro, Antonio
dc.contributor.authorVermeire, Bert
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorStorm, Wolfgang
dc.contributor.authorPolleunis, C.
dc.contributor.authorBertrand, P.
dc.contributor.authorMcGeary, M. J.
dc.contributor.authorLubbers, A.
dc.contributor.authorHatcher, Z.
dc.date.accessioned2021-09-29T13:07:22Z
dc.date.available2021-09-29T13:07:22Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/677
dc.sourceIIOimport
dc.titleJust-Clean- Enough technology for the 21st century
dc.typeOral presentation
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceSEMICON Europe
dc.source.conferencedate4/04/1995
dc.source.conferencelocationGeneva Switzerland
imec.availabilityPublished - open access


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