MEMS 0-level packaging using thin film poly-SiGe caps
dc.contributor.author | Rusu, Cristina | |
dc.contributor.author | Verbist, Agnes | |
dc.contributor.author | Parmentier, Brigitte | |
dc.contributor.author | Witvrouw, Ann | |
dc.date.accessioned | 2021-10-14T23:00:08Z | |
dc.date.available | 2021-10-14T23:00:08Z | |
dc.date.issued | 2002-09 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6780 | |
dc.source | IIOimport | |
dc.title | MEMS 0-level packaging using thin film poly-SiGe caps | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Parmentier, Brigitte | |
dc.source.peerreview | no | |
dc.source.conference | IMAPS ATW on Packaging of MEMS and Related Micro Integrated Nano Systems | |
dc.source.conferencedate | 6/09/2002 | |
dc.source.conferencelocation | Denver, CO USA | |
imec.availability | Published - imec |
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