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MEMS 0-level packaging using thin film poly-SiGe caps
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Authors
Rusu, Cristina
;
Verbist, Agnes
;
Parmentier, Brigitte
;
Witvrouw, Ann
Conference
IMAPS ATW on Packaging of MEMS and Related Micro Integrated Nano Systems
Title
MEMS 0-level packaging using thin film poly-SiGe caps
Publication type
Proceedings paper
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