Show simple item record

Advanced ULSI applications: dilute HCl and SC1

dc.contributor.authorHurd, Trace
dc.date.accessioned2021-09-29T13:07:29Z
dc.date.available2021-09-29T13:07:29Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/680
dc.sourceIIOimport
dc.titleAdvanced ULSI applications: dilute HCl and SC1
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage69
dc.source.endpage74
dc.source.conferenceProceedings of SEMICON/West 1995 Technical Seminar: Cleaning Technology for the Submicron Era
dc.source.conferencedate11/07/1995
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
653.pdf
Size:
248.6Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record