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Growth and properties of strained Si1-x-yGexCylayers

dc.contributor.authorJain, Suresh
dc.contributor.authorOsten, H. J.
dc.contributor.authorDietrich, B.
dc.contributor.authorRücker, H.
dc.date.accessioned2021-09-29T13:07:41Z
dc.date.available2021-09-29T13:07:41Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/686
dc.sourceIIOimport
dc.titleGrowth and properties of strained Si1-x-yGexCylayers
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage1289
dc.source.endpage1302
dc.source.journalSemiconductor Science and Technology
dc.source.volume10
imec.availabilityPublished - imec


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