dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Brongersma, Sywert | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-14T23:22:34Z | |
dc.date.available | 2021-10-14T23:22:34Z | |
dc.date.issued | 2002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6884 | |
dc.source | IIOimport | |
dc.title | Kilometer long copper low-k interconnects | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Brongersma, Sywert | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Brongersma, Sywert::0000-0002-1755-3897 | |
dc.source.peerreview | no | |
dc.source.conference | European Congress on Advanced Materials, their Processes and Applications | |
dc.source.conferencedate | 30/09/2002 | |
dc.source.conferencelocation | München Germany | |
imec.availability | Published - imec | |