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Kilometer long copper low-k interconnects

dc.contributor.authorTokei, Zsolt
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T23:22:34Z
dc.date.available2021-10-14T23:22:34Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6884
dc.sourceIIOimport
dc.titleKilometer long copper low-k interconnects
dc.typeOral presentation
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.source.peerreviewno
dc.source.conferenceEuropean Congress on Advanced Materials, their Processes and Applications
dc.source.conferencedate30/09/2002
dc.source.conferencelocationMünchen Germany
imec.availabilityPublished - imec


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