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Ferroelectric thin films by CSD of aqueous solutions

dc.contributor.authorVan Bael, M.K.
dc.contributor.authorNelis, Daniël
dc.contributor.authorVan Werde, K.
dc.contributor.authorMondelaers, D.
dc.contributor.authorHardy, A.
dc.contributor.authorVan den Rul, H.
dc.contributor.authorMullens, J.
dc.contributor.authorVan Poucke, L.C.
dc.contributor.authorVanhoyland, G.
dc.contributor.authorFrederix, Filip
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-14T23:27:05Z
dc.date.available2021-10-14T23:27:05Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6903
dc.sourceIIOimport
dc.titleFerroelectric thin films by CSD of aqueous solutions
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium P: Advanced Materials for Microelectronics: Ferroelectrics and Low-k Dielectrics
dc.source.conferencedate18/06/2002
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


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