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Lithography for sub-90nm applications
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Authors
Van den hove, Luc
;
Goethals, Mieke
;
Ronse, Kurt
;
Van Bavel, Mieke
;
Vandenberghe, Geert
Conference
IEDM Technical Digest
Title
Lithography for sub-90nm applications
Publication type
Proceedings paper
Embargo date
9999-12-31
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