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Investigation of PECVD dielectrics for nondispersive metal- insulator-metal capacitors
Publication:
Investigation of PECVD dielectrics for nondispersive metal- insulator-metal capacitors
Date
2002
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Huylenbroeck, Stefaan
;
Decoutere, Stefaan
;
Venegas, Rafael
;
Jenei, Snezana
;
Winderickx, Gillis
Journal
IEEE Electron Device Letters
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1915
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1915
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations