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Investigation of PECVD dielectrics for nondispersive metal- insulator-metal capacitors

dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorVenegas, Rafael
dc.contributor.authorJenei, Snezana
dc.contributor.authorWinderickx, Gillis
dc.date.accessioned2021-10-14T23:35:50Z
dc.date.available2021-10-14T23:35:50Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6943
dc.sourceIIOimport
dc.titleInvestigation of PECVD dielectrics for nondispersive metal- insulator-metal capacitors
dc.typeJournal article
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorWinderickx, Gillis
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.source.peerreviewno
dc.source.beginpage191
dc.source.endpage193
dc.source.journalIEEE Electron Device Letters
dc.source.issue4
dc.source.volume23
imec.availabilityPublished - imec


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