dc.contributor.author | Van Huylenbroeck, Stefaan | |
dc.contributor.author | Decoutere, Stefaan | |
dc.contributor.author | Venegas, Rafael | |
dc.contributor.author | Jenei, Snezana | |
dc.contributor.author | Winderickx, Gillis | |
dc.date.accessioned | 2021-10-14T23:35:50Z | |
dc.date.available | 2021-10-14T23:35:50Z | |
dc.date.issued | 2002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6943 | |
dc.source | IIOimport | |
dc.title | Investigation of PECVD dielectrics for nondispersive metal- insulator-metal capacitors | |
dc.type | Journal article | |
dc.contributor.imecauthor | Van Huylenbroeck, Stefaan | |
dc.contributor.imecauthor | Decoutere, Stefaan | |
dc.contributor.imecauthor | Winderickx, Gillis | |
dc.contributor.orcidimec | Van Huylenbroeck, Stefaan::0000-0001-9978-3575 | |
dc.contributor.orcidimec | Decoutere, Stefaan::0000-0001-6632-6239 | |
dc.source.peerreview | no | |
dc.source.beginpage | 191 | |
dc.source.endpage | 193 | |
dc.source.journal | IEEE Electron Device Letters | |
dc.source.issue | 4 | |
dc.source.volume | 23 | |
imec.availability | Published - imec | |