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Implementation of a Si-rich SiON layer for an improved selective SiGe HBT architecture

dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorLoo, Roger
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorVleugels, Frank
dc.contributor.authorKunnen, Eddy
dc.contributor.authorSchaekers, Marc
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-14T23:36:05Z
dc.date.available2021-10-14T23:36:05Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6944
dc.sourceIIOimport
dc.titleImplementation of a Si-rich SiON layer for an improved selective SiGe HBT architecture
dc.typeProceedings paper
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorVleugels, Frank
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.source.peerreviewno
dc.source.beginpage143
dc.source.endpage146
dc.source.conferenceProceedings IEEE Bipolar/BiCMOS Circuits Technology Meeting
dc.source.conferencedate29/09/2002
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - imec


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