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Experimental characterization of stiction due to charging in RF MEMS

dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorPuers, Bob
dc.contributor.authorMertens, Robert
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-14T23:40:16Z
dc.date.available2021-10-14T23:40:16Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6963
dc.sourceIIOimport
dc.titleExperimental characterization of stiction due to charging in RF MEMS
dc.typeProceedings paper
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage901
dc.source.endpage904
dc.source.conferenceIEDM Technical Digest
dc.source.conferencedate9/12/2002
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access


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